منابع مشابه
Micro Machining-A Review
In recent years, advanced materials with unique metallurgical properties such as super alloys, composites and ceramics have been developed to meet the demands of extreme applications. While these materials are harder, tougher, less heat sensitive and more resistant to corrosion and fatigue, they are also difficult to machine. Advanced materials are being widely used these days not only in the a...
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Metal alloys have material properties that are very appealing for micro electro mechanical systems (MEMS), but present a challenge for process integration within a lithographic manufacturing sequence of the type used in the semiconductor industry. The batch-mode micro electrodischarge machining (μEDM) discussed here uses lithographically-fabricated electrode arrays with high density and high un...
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The ability to manufacture and manipulate components at the micro-scale is critical to the development of micro systems. This paper presents the technique to manipulate micro/nano parts at the micro/nano-scale using an integrated Focused Ion Beam (FIB) system composed of scanning electron microscope, micro manipulator and gas injection system. Currently the smallest gears manufactured with trad...
متن کاملCellular Automata Modelling of Micro Abrasive Machining
This paper presents the use of Cellular Automata (CA) for modelling micro abrasive machining. A onedimensional CA was initially used to model the workpiece, as having different heights, to represent the roughness; and the forces from the abrasive grits were modelled to randomly erode the workpiece, as such smoothening out and polishing the surface. The modelling was then extended further to two...
متن کاملMicro-Electro-Discharge Machining Technologies for MEMS
Advances in micromachining techniques have led to the evolution of micro-electromechanical systems (MEMS). These techniques are typically based on semiconductor manufacturing processes, which offer various advantages such as batch manufacturing of miniaturized devices and monolithic integration of microelectronics with the devices. Surface micromachining has been used to construct complex micro...
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ژورنال
عنوان ژورنال: Philosophical Transactions of the Royal Society A: Mathematical, Physical and Engineering Sciences
سال: 2012
ISSN: 1364-503X,1471-2962
DOI: 10.1098/rsta.2011.0056